For citations:
Koshevoi V.L., Belorus A.O., Levitskiy V.S. STUDY OF CRYSTALLINITY PARAMETER DISTRIBUTION FOR mc-Si FILMS, OBTAINED BY PECVD, BY USING RAMAN SPECTROSCOPY. Alternative Energy and Ecology (ISJAEE). 2015;(19):118-123. (In Russ.) https://doi.org/10.15518/isjaee.2015.19.016