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SYNTHESIS OF FILMS AND n-p-STRUCTURES ON COPPER AND ZINC OXIDE BASED BY MAGNETRON SPUTTERING
https://doi.org/10.15518/isjaee.2017.01-03.012-021
Abstract
The results of obtaining zinc oxide films and ZnO/Cu2O(CuO) heterojunctions are presented. Structural, optical and electrical properties of the samples were studied depending on synthesis conditions. ZnO films were grown by magnetron sputtering. The synthesized films with a thickness of about 0.3 micron had a resistivity of 0.0014 Om·sm, mobility of 4.5 cm2/(V·s), free electron concentration of 1·1021 cm-3, and a surface resistance of about 45 ohms per square. The optical transmission coefficient of ZnO films in the visible region was about 90%. Heterojunctions n-ZnO/p-Cu2O(CuO) were obtained by vacuum deposition of copper on ZnO film followed by annealing. The effect of thermal annealing and plasma treatment on the properties of ZnO/Cu2O(CuO) samples was investigated. The photoresponse of heterojunctions was found to be increased, and leakage current was reduced as a result of short -term treatment in hydrogen plasma.
About the Authors
D. V. Ismailov
National Nanotechnology Laboratory of the open type with the Al-Farabi Kazakh National University
Kazakhstan
Kazakhstan
Daniyar Ismailov - Ph.D. Student, Junior Researcher of the National Nanotechnology Laboratory of the open type with the Al-Farabi Kazakh National University.
71 Al-Farabi ave., Almaty, 050000, tel.: +7(778)423-34-48, e-mail: Ismailov_Daniyar_V@bk.ruA. P. Ilin
National Research Tomsk Polytechnic University,Department of General Chemistry and Chemical Technology
Russian Federation
Russian Federation
Ilin Aleksandr - D.Sc. (physics and mathematics), Professor of National Research Tomsk PolytechnicмUniversity, Department of General Chemistry and Chemical Technology.
30 Lenin ave., Tomsk, 634050, tel.: +7(913)58-22-62, e-mail: genchem@mail.ru
L. V. Gritsenko
National Nanotechnology Laboratory of the open type with the Al-Farabi Kazakh National University
Kazakhstan
Kazakhstan
Gritsenko Lesya - Ph.D. (physics and mathematics), Research Associate of the National Nanotechnology Laboratory of the open type with.
71 Al-Farabi ave., Almaty, 050000, tel.: +7(778)423-34-48, e-mail: Ismailov_Daniyar_V@bk.ru
M. T. Gabdullin
National Nanotechnology Laboratory of the open type with the Al-Farabi Kazakh National University
Kazakhstan
Kazakhstan
Gabdullin Maratbek - Ph.D. (physics and mathematics), Director of the National Nanotechnology Laboratory of the open type with.
71 Al-Farabi ave., Almaty, 050000, tel.: +7(778)423-34-48, e-mail: Ismailov_Daniyar_V@bk.ru
Kh. A. Abdullin
National Nanotechnology Laboratory of the open type with the Al-Farabi Kazakh National University
Kazakhstan
Kazakhstan
D.Sc. (physics and mathematics), Professor, Head of Laboratory Synthesis of Nanostructured Materials of National Nanotechnology Laboratory of the open type with the Al-Farabi Kazakh National University.
71 Al-Farabi ave., Almaty, 050000, tel.: +7(778)423-34-48, e-mail: Ismailov_Daniyar_V@bk.ruD. V. Schur
Frantsevich Institute for Problems of Materials Science of NASU
Ukraine
Ukraine
Dmitry Schur- Ph.D. (chemistry), Professor, Chief of Laboratory No 67 “Investigation of Processes and Systems of Hydrogen and Solar-Hydrogen Energy Transformation” in Institute for Problems of Materials Science of NAS of Ukraine.
3 Krzyzanowski str., Kiev-142, 03680, fax: 38(044)424-0381, e-mail: dmitry.schur@gmail.com, shurzag@materials.kiev.ua
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Review
For citations:
Ismailov D.V., Ilin A.P., Gritsenko L.V., Gabdullin M.T., Abdullin Kh.A., Schur D.V. SYNTHESIS OF FILMS AND n-p-STRUCTURES ON COPPER AND ZINC OXIDE BASED BY MAGNETRON SPUTTERING. Alternative Energy and Ecology (ISJAEE). 2017;(1-3):12-21. (In Russ.) https://doi.org/10.15518/isjaee.2017.01-03.012-021
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